JPH0353195Y2 - - Google Patents
Info
- Publication number
- JPH0353195Y2 JPH0353195Y2 JP9330384U JP9330384U JPH0353195Y2 JP H0353195 Y2 JPH0353195 Y2 JP H0353195Y2 JP 9330384 U JP9330384 U JP 9330384U JP 9330384 U JP9330384 U JP 9330384U JP H0353195 Y2 JPH0353195 Y2 JP H0353195Y2
- Authority
- JP
- Japan
- Prior art keywords
- moving
- block
- movement
- guide
- moving block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005540 biological transmission Effects 0.000 claims description 9
- 238000010894 electron beam technology Methods 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 5
- 238000009434 installation Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9330384U JPS618893U (ja) | 1984-06-22 | 1984-06-22 | 試料移動装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9330384U JPS618893U (ja) | 1984-06-22 | 1984-06-22 | 試料移動装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS618893U JPS618893U (ja) | 1986-01-20 |
JPH0353195Y2 true JPH0353195Y2 (en]) | 1991-11-20 |
Family
ID=30650860
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9330384U Granted JPS618893U (ja) | 1984-06-22 | 1984-06-22 | 試料移動装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS618893U (en]) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0411195Y2 (en]) * | 1986-05-10 | 1992-03-19 |
-
1984
- 1984-06-22 JP JP9330384U patent/JPS618893U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS618893U (ja) | 1986-01-20 |
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